Jan. 2000

COREMA-WT system developed by Fraunhofer IAF, Freiburg

May 2003

Founding of the SemiMap Scientific Instruments GmbH, Freiburg

Jul. 2003

First COREMA-RM system installed

Sep. 2003

Website published

Apr. 2003

SEMI Leadership Award 2003 for Dr. Wolfgang Jantz [PIC]

Feb. 2004

First COREMA-VT measurement

Jul. 2004

Karl Urbanek Memorial Award 2004 for Dr. Wolfgang Jantz [PIC]

Oct. 2004

Commercial COREMA-VT measurement up to 350°C

Mar. 2005

Commercial application of COREMA-WT to s.i. SiC and GaN